Title:
クライオポンプ
Document Type and Number:
Japanese Patent JP6578593
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a cryopump which lengthens an operation time.SOLUTION: A cryopump 100 which condenses gas and discharges the gas has such a structure that a core rod 130 as a member which is cooled to a very low temperature in order to condense gas is provided, and a cutter member 132 which is cylindrical and performs reciprocating driving in the axial direction of the core rod 130 is provided. When the discharging is started, hydrogen isotope is condensed onto the core rod 130 and is attached as solid hydrogen. In such a state, the cutter member 130 is driven from above to below, solid hydrogen is scraped down by the cutter member to a receptor 140 and is discharged from discharge pipes 141, 142. By employing such a structure, the cryopump 100 can be continuously operated without performing regeneration.SELECTED DRAWING: Figure 2
Inventors:
Junichi Miyazawa
Application Number:
JP2015112781A
Publication Date:
September 25, 2019
Filing Date:
June 03, 2015
Export Citation:
Assignee:
National Institute for Natural Sciences
International Classes:
F04B37/16; F04B37/08; G21B1/11
Domestic Patent References:
| JP2003207282A | ||||
| JP2004174392A | ||||
| JP61038178A |
Foreign References:
| US20030150220 |
Attorney, Agent or Firm:
Mitsuhiro Kato