Title:
クライオポンプ
Document Type and Number:
Japanese Patent JP6629074
Kind Code:
B2
Abstract:
A cryopump includes a second cryopanel unit which is thermally connected to a second cooling stage of a cryocooler, a radiation shield which includes a shield main opening, a shield side opening, and a shield bottom opening, and a cryopump housing having a housing bottom portion which faces the shield bottom opening. A dimension of the shield bottom opening is larger than a distance from the second cryopanel unit to the housing bottom portion.
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Inventors:
Takahashi Run
Application Number:
JP2016002490A
Publication Date:
January 15, 2020
Filing Date:
January 08, 2016
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP4187873A | ||||
| JP6033874A | ||||
| JP2010516939A |
Foreign References:
| US20050155358 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo