Title:
結晶成長装置
Document Type and Number:
Japanese Patent JP7129856
Kind Code:
B2
Abstract:
A crystal growth apparatus including: a heat source, a crucible including a container body in which a raw material can be received and a lid part on which a seed crystal can be mounted; a first heat insulating part which is disposed externally of the crucible and in which a first through-hole penetrating in a thickness direction is provided; a second heat insulating part which is disposed externally of the first heat insulating part and in which a second through-hole penetrating in a thickness direction is provided; a moving mechanism configured to move the first heat insulating part and the second heat insulating part relative to each other; and a radiation type temperature measuring unit configured to measure a temperature of the crucible via the first through-hole and the second through-hole.
Inventors:
Shunsuke Noguchi
Application Number:
JP2018167067A
Publication Date:
September 02, 2022
Filing Date:
September 06, 2018
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
C30B23/06; C30B19/00; C30B25/02; C30B29/06; C30B29/36; C30B29/38; C30B29/42; F27B14/20; F27D21/00
Domestic Patent References:
| JP2011219287A | ||||
| JP2012131679A |
Attorney, Agent or Firm:
Shu Oikawa
Norihiko Ara
Tomomasa Katsumata
Norihiko Ara
Tomomasa Katsumata