Title:
結晶成長炉システム
Document Type and Number:
Japanese Patent JP4909970
Kind Code:
B2
Abstract:
A crystal-growing furnace system includes an isolated chamber, a furnace upper body, and a controller room, wherein the isolated chamber and the controller room are arrayed and isolated from each other. A door is provided between the controller room and the isolated chamber so as to isolate or communicate the controller room from or with the isolated chamber. The isolated chamber includes, among others, a top board, a furnace lower body, and a lifting device, wherein the lifting device moves the furnace lower body upward and closes the furnace upper body so as to form an enclosed crystal-growing furnace, or downward and departs from the furnace upper body. Because the isolated chamber and the controller room are arranged isolating from each other, noise, high temperature, and dust pollution can be isolated from the isolated room, so that personnel working in the controller room can be assured of safety and health. Moreover, since the furnace upper body is arranged outside of the isolated chamber, heat can be transpired directly to the atmosphere, without the need of huge air conditioning devices for cooling factory, and thus having merits both on energy saving and safety.
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Inventors:
Show-Jen Leu
Full-Ron Lin
Full-Ron Lin
Application Number:
JP2008250052A
Publication Date:
April 04, 2012
Filing Date:
September 29, 2008
Export Citation:
Assignee:
Green Energy Technology Ink.
International Classes:
C30B29/06; C30B28/06; F27B14/04; F27B14/08; F27B14/20; C01B33/02
Domestic Patent References:
| JP1072278A | ||||
| JP2002293526A | ||||
| JP56129696A | ||||
| JP1305882A |
Attorney, Agent or Firm:
Hiroe Associates Patent Office