Title:
CRYSTAL OSCILLATOR AND MANUFACTURING METHOD OF CRYSTAL OSCILLATOR
Document Type and Number:
Japanese Patent JP2014192647
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a crystal oscillator capable of printing identification marks on lid plates or base plates and a crystal oscillation piece.SOLUTION: A manufacturing method of a crystal oscillator comprises: a step (S302) of preparing a crystal oscillation piece on which a first metal film is formed; a step (S201) of preparing a base wafer on which a plurality of base plates are formed; a step (S101) of preparing a lid wafer on which a plurality of lid plates are formed; and a placement step (S401) of placing the crystal oscillation piece on each of the base plates on the base wafer. The manufacturing method further comprises: a bonding step (S501) of bonding the lid wafer to the base wafer; and a print step (S502) of printing, after the bonding step, an index mark on the first metal film with the use of a laser. In addition, a second metal film overlapping the first metal film in the height direction is formed on at least one of the lid plates and the base plates, and the index mark is printed on each of the first metal film and the second metal film with the use of the laser in the print step.
Inventors:
KIKUCHI KENICHI
Application Number:
JP2013065325A
Publication Date:
October 06, 2014
Filing Date:
March 27, 2013
Export Citation:
Assignee:
NIHON DEMPA KOGYO CO
International Classes:
H03H9/02; H01L23/00; H01L23/02; H03H3/02; H03H9/19
Attorney, Agent or Firm:
Nobukazu Ito