PURPOSE: To manufacture a crystal resonator with high stability and in a short time by holding a quartz plate for oscillation with a photosensitive crystallized glass plate whose thermal expansion coefficient is equal to that of the quartz plate, directly joining the photosensitive crystallized glass plate exposed to ultraviolet rays with the quartz plate for oscillation, and applying etching to an exposure part.
CONSTITUTION: Since a glass plate 2 can be easily worked by hydrofluoric acid, etc., by holding a quartz plate 1 by using the glass plate 2, the shape of a holding part can be formed in arbitrary shape and also, it can be worked inexpensively. Also, stress due to the difference of the thermal expansion coefficients of the quartz plate 1 and the holding part can be suppressed by holding the quartz plate with the glass plate with almost the same thermal expansion coefficient as that of the quartz plate. Therefore, the fluctuation of an oscillation frequency due to temperature change can be suppressed. Also, it is possible to omit work to cover a part where no corrosion in acid is desired to occur with a material hard to be molten in acid such as an organic material or gold, etc., based on the difference of etching rate in which the part is molten in acid faster than another part by using the photosensitive crystallized glass plate 1 and applying crystallization by irradiating with the ultraviolet rays, and manufacture can be performed in a short time.
KANAHOSHI AKIHIRO
KORIYOU TETSUYOSHI
TAGUCHI YUTAKA
EDA KAZUO
