Title:
CRYSTALLINE OXIDE FILM, STRUCTURE INCLUDING THE SAME AND METHOD FOR MANUFACTURING CRYSTALLINE OXIDE FILM
Document Type and Number:
Japanese Patent JP2022072611
Kind Code:
A
Abstract:
To provide a perovskite type oxide thin film having high conductivity and including doped rare earth metal.SOLUTION: A crystalline oxide film including an oxide obtained by doping a rare earth element in a perovskite type oxide represented by a composition formula AXBYO3 (where, A and B represent different metal elements; X is 0.95≤X≤1.05; and Y is 0.60≤Y≤1.05.) has 0.25 degree or less of a rocking curve half value width measured on a (004) plane by an X-ray diffraction method. Preferably, A in the composition formula is a group 2 element, especially Sr, and B is a group 14 element, especially, Sn.SELECTED DRAWING: Figure 1
Inventors:
YOSHIDA KAZUMA
IKEDA MAKOTO
YAGYU SHINGO
IGAWA TAKUTO
IKEDA MAKOTO
YAGYU SHINGO
IGAWA TAKUTO
Application Number:
JP2020182146A
Publication Date:
May 17, 2022
Filing Date:
October 30, 2020
Export Citation:
Assignee:
MITSUI MINING & SMELTING CO LTD
FLOSFIA INC
FLOSFIA INC
International Classes:
C23C16/40; C04B35/01; H01L21/365; H01L21/368
Attorney, Agent or Firm:
Showa International Patent Office
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