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Title:
CUP TYPE SUPERABRASIVE WHEEL AND METHOD OF SURFACE GRINDING FOR WAFER
Document Type and Number:
Japanese Patent JP2005034931
Kind Code:
A
Abstract:

To provide a cup type superabrasive wheel and a method of surface grinding for a wafer, by which highly precise grinding operation can be performed without generating a recessed portion at the rotation center of a workpiece, such as a wafer.

Tips 1, 2 having two different active face areas are fixed on the end face of the cup type base metal, the end face being perpendicular to the axis of the cup type base metal. The distance R1 from the axis of the cup type base metal to the farmost end portion of the tip 1 having the large active face area is set so as to be longer than that of the tip 2 having the small active face area. The width T2 of the tip 2 having the small active face area is set so as to be smaller than that T1 of the tip 1 having the large active face area. A circle or an ellipse is favorable to the shape of the tips. Further, setting-up is carried out such that the rotational center of the wafer is ground only by the tip having the large active face area.


Inventors:
TANAKA HIROSHI
Application Number:
JP2003198816A
Publication Date:
February 10, 2005
Filing Date:
July 18, 2003
Export Citation:
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Assignee:
ALLIED MATERIAL CORP
NANOTEMU KK
International Classes:
B24B7/04; B24B1/00; B24B7/20; B24D3/00; B24D7/00; B24D7/06; (IPC1-7): B24D7/00; B24B1/00; B24B7/04; B24B7/20; B24D3/00; B24D7/06
Domestic Patent References:
JPH11207634A1999-08-03
JPS63158766U1988-10-18
JP2000288882A2000-10-17
JPH09155747A1997-06-17
JPH02160474A1990-06-20



 
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