Title:
CUTTER
Document Type and Number:
Japanese Patent JP2009045674
Kind Code:
A
Abstract:
To provide a cutter capable of stably reducing vibration over a range from low-speed to high-speed rotation.
The cutter includes a chuck table for supporting a workpiece and a cutting blade for cutting the workpiece supported on the chuck table. A rotation balancer is formed on at least one of a fixed flange fixed to a spindle and a fixed nut for fixing the cutting blade to the spindle. The rotation balancer comprises an annular permanent magnet for constituting an inner peripheral wall close to a rotation axis center, an annular chamber defined by the annular permanent magnet and an outer peripheral wall separate from the rotation axis center, and a plurality of ferromagnetic pellets provided in the annular chamber.
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Inventors:
KUMAGAI SOSUKE
HASHIMOTO HIROKIMI
HASHIMOTO HIROKIMI
Application Number:
JP2007211121A
Publication Date:
March 05, 2009
Filing Date:
August 13, 2007
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B45/00; B23Q11/00; B24B27/06; H01L21/301
Domestic Patent References:
JP2001129743A | 2001-05-15 | |||
JPS52101092U | 1977-08-01 | |||
JPS60106141U | 1985-07-19 | |||
JPH04312244A | 1992-11-04 | |||
JPH069867U | 1994-02-08 | |||
JPH10257710A | 1998-09-25 |
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito
Kenji Ito
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