Title:
Cutting equipment
Document Type and Number:
Japanese Patent JP6329019
Kind Code:
B2
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Inventors:
Fukuoka Takeomi
Application Number:
JP2014143701A
Publication Date:
May 23, 2018
Filing Date:
July 11, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B41/06
Domestic Patent References:
| JP200585790A |
Attorney, Agent or Firm:
Hiroaki Sakai