Title:
切削ブレードの装着機構
Document Type and Number:
Japanese Patent JP6938087
Kind Code:
B2
Abstract:
A cutting blade mounting mechanism includes: a blade mount mounted to a spindle; and an air supply unit supplying air to the blade mount. The blade mount includes: a columnar boss section inserted into a through-hole provided in an annular base of the cutting blade; a flange section projecting in a radial direction from a side of a base end of the boss section; and an ejector type blade suction section having a first air passage connecting a supply port supplied with air from the air supply unit and a discharge port discharging the air, and a second air passage connecting a suction port opening to a side of a support surface of the flange section and the first air passage. A plurality of the discharge ports are formed in an outer peripheral face of the boss section.
Inventors:
Kazuma Sekiya
Application Number:
JP2017181005A
Publication Date:
September 22, 2021
Filing Date:
September 21, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B27/06; H01L21/301
Domestic Patent References:
| JP2016132046A | ||||
| JP9314465A | ||||
| JP201098029A | ||||
| JP2002154054A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro