Title:
CUTTING DEVICE AND CUTTING METHOD OF WORKPIECE
Document Type and Number:
Japanese Patent JP2022041697
Kind Code:
A
Abstract:
To provide a cutting device and a cutting method of a workpiece, capable of further reducing vibrations of a cutting blade than before.SOLUTION: A cutting device has a chuck table that holds a workpiece, a cutting unit 20 that cuts the workpiece held by the chuck table with a cutting blade 21 fixed at a tip end of a spindle 22 through a mount 24, and a nozzle 30 that supplies cutting water to the cutting blade 21. The cutting blade 21 has a thickness of 0.2 mm or less and an aspect ratio of 30 or more indicated by cutting edge takeout amount/blade thickness, is fixed to the mount 24, and is equipped with a nozzle 31 supplying a cutting water from an outer peripheral to an outer peripheral surface of the cutting blade 21 in parallel with a side surface 21-3 of the cutting blade 21. The nozzle 31 is equipped with a partitioning plate 38 straightening a flow of the cutting water inside.SELECTED DRAWING: Figure 3
Inventors:
FUKUOKA TAKEOMI
MIYAZAKI TAKASHI
MIYAZAKI TAKASHI
Application Number:
JP2020147052A
Publication Date:
March 11, 2022
Filing Date:
September 01, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B27/06; B24B45/00; B24B55/02; H01L21/301
Attorney, Agent or Firm:
Sakai International Patent Office