Title:
切削装置及び切削方法
Document Type and Number:
Japanese Patent JP6847512
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a cutting method and a cutting device that are able to allow easy check of the flatness of an annular end face and are able to cut a work piece without unstably moving a cutting blade.SOLUTION: A mount flange 32 comprises: a flange part 36 fixed to the leading end of a spindle 26 and defining an annular recess 58 on the inner periphery of an annular end face 36a and from a boss part 34; and a suction passage 64 one end of which opens in the annular recess 58 and the other end of which communicates with a suction source 72. A cutting process comprises: a leak detection step in which, after a cutting blade 28 is attached to the spindle 26, air is sucked by the suction source 72 and the presence or absence of leak of air from the annular recess 36a is detected; a spindle rotation step in which, in a case where a leak of air is not detected in the leak detection step, the spindle 26 is rotated; and a cutting step in which, after the spindle rotation step, a work piece is cut by the cutting blade 28.SELECTED DRAWING: Figure 4
Inventors:
Satoshi Hanashima
Application Number:
JP2016242234A
Publication Date:
March 24, 2021
Filing Date:
December 14, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B27/06; H01L21/301
Domestic Patent References:
| JP2015023222A | ||||
| JP2015020237A | ||||
| JP2009045674A |
Foreign References:
| US20160311127 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro