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Title:
切削装置
Document Type and Number:
Japanese Patent JP4658730
Kind Code:
B2
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Inventors:
Fumiteru Tashino
Application Number:
JP2005218959A
Publication Date:
March 23, 2011
Filing Date:
July 28, 2005
Export Citation:
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Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; B24B1/04; B24B45/00; H01L21/301
Domestic Patent References:
JP2004291636A
JP2004351912A
JP2000210928A
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki



 
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