Title:
切削装置
Document Type and Number:
Japanese Patent JP4977428
Kind Code:
B2
Inventors:
Sosuke Kumagai
Hiroko Hashimoto
Hiroko Hashimoto
Application Number:
JP2006272114A
Publication Date:
July 18, 2012
Filing Date:
October 03, 2006
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B41/04; B24B45/00
Domestic Patent References:
| JP2006228831A | ||||
| JP2006247786A | ||||
| JP2003191111A | ||||
| JP2003340668A | ||||
| JP2001038641A | ||||
| JP39020099Y1 | ||||
| JP2006318981A | ||||
| JP2007111809A | ||||
| JP2007073645A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki