Title:
切削装置
Document Type and Number:
Japanese Patent JP5096052
Kind Code:
B2
Inventors:
Masami Sato
Application Number:
JP2007164535A
Publication Date:
December 12, 2012
Filing Date:
June 22, 2007
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; B24B45/00; H01L21/301
Domestic Patent References:
| JP2003191111A | ||||
| JP8257903A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki