Title:
切削装置
Document Type and Number:
Japanese Patent JP5184250
Kind Code:
B2
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Inventors:
Masami Sato
Application Number:
JP2008199743A
Publication Date:
April 17, 2013
Filing Date:
August 01, 2008
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B23B31/02; H01L21/301
Domestic Patent References:
| JP10340867A | ||||
| JP2007331060A | ||||
| JP63256357A | ||||
| JP11077528A |
Foreign References:
| WO2001036157A1 |
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito
Kenji Ito