Title:
切削装置
Document Type and Number:
Japanese Patent JP5199777
Kind Code:
B2
Inventors:
Toyohiro Omiyama
Application Number:
JP2008200530A
Publication Date:
May 15, 2013
Filing Date:
August 04, 2008
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B23B31/02; B24B27/06; H01L21/301
Domestic Patent References:
| JP2007105829A | ||||
| JP2004281700A | ||||
| JP9029627A |
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Ken Kubo
Kyoko Kawamura
Ken Kubo