Title:
切削装置
Document Type and Number:
Japanese Patent JP6397270
Kind Code:
B2
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Inventors:
Satoshi Hanashima
Takekawa Masahiro
Takekawa Masahiro
Application Number:
JP2014171905A
Publication Date:
September 26, 2018
Filing Date:
August 26, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B41/06
Domestic Patent References:
| JP2009076773A | ||||
| JP2013131709A | ||||
| JP2009043771A | ||||
| JP2013004666A | ||||
| JP2002231658A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sayaka Hirakawa
Toshiyuki Kojima
Sachiko Okunuki
Sayaka Hirakawa
Toshiyuki Kojima