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Title:
切削装置
Document Type and Number:
Japanese Patent JP6441737
Kind Code:
B2
Abstract:
The objective of the present invention is to provide a cutting apparatus capable of reducing manufacturing costs by reducing the number of components and simplifying the configuration of the whole apparatus to realize miniaturization. The cutting apparatus comprises: a cassette placing unit; a feeding and discharging unit for feeding and discharging workpieces to and from a cassette placed in the cassette placing unit; a temporary mounting unit for temporarily mounting the workpieces discharged from the cassette by the feeding and discharging unit; a maintaining table for maintaining the workpieces temporarily mounted on the temporary mounting unit; a cutting unit for cutting the workpieces maintained on the maintaining table; and a process transferring unit for processing and transferring the maintaining table in a processing and transferring direction (X axis). The process transferring unit is composed of: an X-axis guide rail for movably supporting the gap between a workpiece detaching area where the maintaining table is arranged, and a process area where the cutting unit is arranged, in the X-axis direction; and a process transferring unit for transferring the maintaining table along the X-axis guide rail. The feeding and discharging unit comprises: a supporting frame; a gripping member for gripping the workpieces contained in the cassette, and arranged on the supporting frame; a pair of regulating pins for regulating the workpieces to be located at a certain position; and a transferring movable unit of moving the supporting frame in a Y-axis direction. The temporary mounting unit comprises: a pair of supporting rails having a bottom unit and a side unit supporting both side units of the workpieces by extending in the Y-axis direction, wherein the bottom unit is configured to be opened or closed; an opening and closing unit for opening or closing the bottom unit of the pair of supporting rails; and an elevating unit for moving the pair of supporting rails up and down.

Inventors:
Satoshi Okawara
Yagihara Atsushi
Kentaro Terashi
Katsuhiko Akase
Shintaro Matsuoka
Manpei Tanaka
Application Number:
JP2015092101A
Publication Date:
December 19, 2018
Filing Date:
April 28, 2015
Export Citation:
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Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; H01L21/301; B24B41/06; H01L21/304; H01L21/677
Domestic Patent References:
JP2002299288A
JP2001053034A
JP11162887A
JP2002329683A
JP11162890A
JP11204461A
JP5338728A
Foreign References:
US20020162438
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sayaka Hirakawa
Toshiyuki Kojima



 
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