Title:
切削装置
Document Type and Number:
Japanese Patent JP7043346
Kind Code:
B2
Abstract:
To provide a cutting device capable of easily performing the end face correction without replacing the jig chuck table. It includes: a holding table 30 that holds the workpiece; a cutting blade that cuts the workpiece held on the holding table 30; and a mounting flange 24 with the end surface 24C that clamps and fixes the cutting blade at the front end of the main shaft 22 that rotates the blade. The holding table 30 has: a holding jig 34 having a holding surface 34a for holding the workpiece; a plurality of avoidance slots 34c formed at the position corresponding to the predetermined dividing line of the workpiece held in the holding jig 34; and a plurality of fine holes 34d formed in each area divided by the avoidance slots 34c. The holding table 30 has an end face correction jig 100 including: a grinding stone 101 grinding the end surface 24C of the mounting flange 24 on the holding jig 34; and a grindstone support member 102 which holds the grinding stone 101.
Inventors:
Kusunoki Kinhiro
Application Number:
JP2018096174A
Publication Date:
March 29, 2022
Filing Date:
May 18, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B7/16; B24B27/06; H01L21/301
Domestic Patent References:
| JP2018037511A | ||||
| JP2017152442A | ||||
| JP2016162973A | ||||
| JP2013198944A | ||||
| JP2009297855A | ||||
| JP2011011299A | ||||
| JP2012223848A | ||||
| JP2011255458A |
Foreign References:
| US20050268763 |
Attorney, Agent or Firm:
Sakai International Patent Office
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