Title:
CUTTING METHOD
Document Type and Number:
Japanese Patent JP2018075662
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To remove a matter adhered to a cutting blade, thereby preventing cutting capacity degradation of the cutting blade.SOLUTION: A cutting method for cutting a work-piece by an annular cutting blade along a cutting scheduled line which is set for the work-piece comprises a cutting step at which the cutting blade which is rotated and a holding table which holds the work-piece are relatively moved in a processing feed direction, and the work-piece is cut by the cutting blade along the cutting scheduled line. At the cutting step, a cleaning fluid is ejected toward an outer peripheral edge of the cutting blade and cutting is performed while cleaning a tip and a tip side lateral face of the cutting blade. The cleaning fluid is ejected from a nozzle, which is positioned on a rotation direction side of the cutting blade at one point of the outer peripheral edge on a tangent line of the outer peripheral edge, in a direction reverse to the rotation direction of the cutting blade at the one point.SELECTED DRAWING: Figure 2
Inventors:
NAGASAWA TADATO
TAKEDA YUKIO
TAKEDA YUKIO
Application Number:
JP2016218752A
Publication Date:
May 17, 2018
Filing Date:
November 09, 2016
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/06; B24B27/06; B24B57/02; H01L21/301
Domestic Patent References:
| JP2016128202A | 2016-07-14 | |||
| JP2005057160A | 2005-03-03 | |||
| JP2001191251A | 2001-07-17 | |||
| JPS6274571A | 1987-04-06 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro