Title:
CVD INGREDIENT SOLUTION AND METHOD FOR VAPORIZING THE SAME
Document Type and Number:
Japanese Patent JP2004360059
Kind Code:
A
Abstract:
To provide a CVD ingredient solution which is capable of reducing the amount of a solvent used in making a thin film by a solution vaporization CVD method and excellent in long-term stability and to provide a method for vaporizing the ingredient solution stably for a long time.
A 2,2,6,6-tetramethyl-3,5-octane-dione ligand containing metal complex represented by structural formula (I) is used as a metal-containing organic compound used as a solute of the ingredient solution. In structural formula (I), x is an integer of 0 to 4; y is an integer of 1 to 4; M is a metal or Ti=O wherein R is a 1 to 5C alkyl group; and M has a valence equal to x+y. The mixed solution is fed into a vaporizer.
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Inventors:
FURUYAMA KOICHI
TAZAKI YUZO
YODA KOJI
TAZAKI YUZO
YODA KOJI
Application Number:
JP2003191458A
Publication Date:
December 24, 2004
Filing Date:
May 30, 2003
Export Citation:
Assignee:
TOYOSHIMA SEISAKUSHO KK
International Classes:
C07C45/77; C07C49/92; C07F1/08; C07F3/00; C07F3/04; C07F5/00; C07F7/28; C07F13/00; C23C16/40; (IPC1-7): C23C16/40; C07C45/77; C07C49/92
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