Title:
環状化合物、その製造方法、感放射線性組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JP6313046
Kind Code:
B2
Abstract:
A cyclic compound of the present invention has a molecular weight of 500 to 5000, and is represented by the following formula (1):
Inventors:
Echigo Masatoshi
Masako Yamakawa
Masako Yamakawa
Application Number:
JP2013544301A
Publication Date:
April 18, 2018
Filing Date:
November 14, 2012
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
C07C43/215; C07C37/20; C07C41/16; C07C43/23; G03F7/004; G03F7/038; H01L21/027
Foreign References:
| WO2011024916A1 | ||||
| WO2012133040A1 |
Other References:
RUDERISCH,A.et al.,Microelectronic Engineering,2003,Vol.67-68,p.292-299
PARULEKAR,S.N.et al.,Chemical Communications(Cambridge,United Kingdom),2007,No.46,p.4901-4903
MORIKAWA,O.et al.,Polymer Bulletin(Heidelberg,Germany),2005,Vol.53,No.2,p.97-107
MORIKAWA,O.et al.,Journal of Physical Organic Chemistry,2006,Vol.19,No.3,p.214-218
BALASUBRAMANIAN,R.et al.,Journal of Materials Chemistry,2007,Vol.17,No.1,p.105-112
MANN,G.et al.,Supramolecular Chemistry,1994,Vol.3,No.2,p.101-13
PARULEKAR,S.N.et al.,Chemical Communications(Cambridge,United Kingdom),2007,No.46,p.4901-4903
MORIKAWA,O.et al.,Polymer Bulletin(Heidelberg,Germany),2005,Vol.53,No.2,p.97-107
MORIKAWA,O.et al.,Journal of Physical Organic Chemistry,2006,Vol.19,No.3,p.214-218
BALASUBRAMANIAN,R.et al.,Journal of Materials Chemistry,2007,Vol.17,No.1,p.105-112
MANN,G.et al.,Supramolecular Chemistry,1994,Vol.3,No.2,p.101-13
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Kazuhiko Naito
Toshifumi Onuki
Kazuhiko Naito