CYLINDER INNER-PRESSURE SENSOR

Japanese Patent JP2017032491

A

PROBLEM TO BE SOLVED: To provide a cylinder inner-pressure sensor that can suppress increase in size even when the cylinder inner-pressure is provided with a stopper part and temperature correction resistor.SOLUTION: A cylinder inner pressure sensor comprises: a semiconductor substrate 10; a mesa part 11 which is formed on an outer peripheral surface of the semiconductor substrate 10, and of which a resistance value varies in accordance with a temperature and pressure; and a force transmission block that is fixed to an apex surface 16 of the mesa part 11, in which a cylinder inner-pressure acts on the mesa part 11 via the force transmission block. In the cylinder inner-pressure sensor, on a processed surface 12 serving a surface having the mesa part 11 formed of the outer peripheral surface of the semiconductor substrate 10, provided is a first stopper part 14 of which a height is lower than that of the mesa part 11, and on which the force transmission block is not fixed. On an apex surface 17 of the first stopper part 14, temperature sensing resistor 30 is provided of which a resistance value varies in accordance with a temperature, and the mesa part 11 and the temperature sensing resistor 30 are provided in series in a constant current circuit. Either end voltage of the mesa part 11 and either end voltage of the first stopper part 14 are used to output a signal corresponding to the cylinder inner-pressure.SELECTED DRAWING: Figure 2

HASHIMOTO SEIJI
HARADA YASUHIKO
NISHIBE YUJI
MIZUNO KENTARO
HASHIMOTO SHOJI

JP2015155145A

February 09, 2017

August 05, 2015

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TOYOTA MOTOR CORP
TOYOTA CENTRAL RES & DEV

G01L23/22; G01L9/00; G01L23/18; H01L29/84

Makoto Onda
Hironobu Onda

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