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Patent Searching and Data


Title:
DARK FIELD MICROSCOPE
Document Type and Number:
Japanese Patent JPH0915507
Kind Code:
A
Abstract:

To attain the observation of only the minite object without reducing the resolution at the time of observing the minute object which is equal to or below the resolution through the dark field microscope.

Between a light source 21 and a sample 25, an aperture diaphragm 10 is arranged on the incident pupil position of a condenser lens 24. Light from the light source 21 is partly shielded by the aperture diaphragm 10. And also, a light shielding member 15 is arranged on the exit pupil position of an objective lens 26, and light passing by the objective lens side far away from zero-order diffracted light by the sample 25 among illuminating light is partly shielded by the light shielding member 15.


Inventors:
NISHIDA HIROYUKI
Application Number:
JP16736395A
Publication Date:
January 17, 1997
Filing Date:
July 03, 1995
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
G02B21/10; (IPC1-7): G02B21/10
Attorney, Agent or Firm:
Yasushi Shinohara