To enhance a manufacturing yield by performing correlative analysis on characteristics of products and a state of a device.

In a certain manufacturing equipment, a maintenance process (device measuring) is executed for a certain time, and thereafter a process for a product A and a process for a product B are executed in sequence. Next, the device measuring is again executed. Thereafter, a process for a product C is further executed, and after the process for the product C, the device measuring is again executed. In such the manufacturing equipment, device measuring information is produced in each device measuring, and product historical information is produced in each process for a product. The produced information is immediately inputted to an inspection data management system, and is additionally recorded to a data recorder in each device or in each product. At that time, if the product historical information produced based on results of the process of the product is recorded in response to the product, the up-to-date device measuring information of the device which is further processed is further recorded as data in response to the product.