Title:
データ処理システム及び微細構造物製造システム、並びにデータ処理方法及び微細構造物製造方法
Document Type and Number:
Japanese Patent JP5803537
Kind Code:
B2
Inventors:
Kimio Ito
Yuki Arizuka
Yuki Arizuka
Application Number:
JP2011221736A
Publication Date:
November 04, 2015
Filing Date:
October 06, 2011
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G06F21/10; G06F21/62; G11B7/24012; G11B7/26; G11B20/10
Domestic Patent References:
| JP2001222571A | ||||
| JP2007179419A | ||||
| JP2011129020A | ||||
| JP2007193529A | ||||
| JP9198719A |
Foreign References:
| WO2009034772A1 |
Attorney, Agent or Firm:
Junzo Yoneda
Masataka Ota
Hideo Sarada
Masataka Ota
Hideo Sarada