Title:
デブリ軽減システムおよびリソグラフィ装置
Document Type and Number:
Japanese Patent JP4637164
Kind Code:
B2
Abstract:
A debris mitigation system for trapping debris coming from a tin debris-generating radiation source is provided. The debris mitigating system includes a debris barrier comprising a plurality of foils, and a cleaning system constructed and arranged to clean the foils. The cleaning system includes a supply unit to provide a liquid alloy to the foils to dissolve and flush trapped debris from the foils. The alloy includes gallium, indium, tin, or any combination thereof.
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Inventors:
Van Harpen, Marten, Marinus, Johannes, Wilhelms
Sur, Wouter, Anton
Sur, Wouter, Anton
Application Number:
JP2007328126A
Publication Date:
February 23, 2011
Filing Date:
December 20, 2007
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; H05G2/00
Domestic Patent References:
| JP200520006A | ||||
| JP2005129936A | ||||
| JP2006329664A | ||||
| JP2006523038A | ||||
| JP2007500440A | ||||
| JP2007517396A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki