Title:
DECOMPRESSION DRY DEVICE AND DECOMPRESSION DRY METHOD
Document Type and Number:
Japanese Patent JP2017138022
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a decompression dry device and decompression dry method capable of stably drying a coating film even when a vacuum pump configured to decompress a chamber part is made into a large capacity.SOLUTION: A decompression dry device configured to dry a coating film coated on a substrate under a decompression environment, includes a chamber part having a substrate storage part in which the substrate is stored; and a suction decompression part configured to decompress pressure of the substrate storage part by suctioning the substrate storage part. The chamber part includes a decompression adjustment part configured to reduce a decompression speed of the suction decompression part by supplying gas to the substrate storage part, thereby adjusting the substrate storage part to predetermined pressure.SELECTED DRAWING: Figure 1
Inventors:
OKAMOTO SHUNICHI
ISHIWATARI TORU
ISHIWATARI TORU
Application Number:
JP2016017622A
Publication Date:
August 10, 2017
Filing Date:
February 02, 2016
Export Citation:
Assignee:
TORAY ENG CO LTD
International Classes:
F26B5/04; B05C9/12; F26B21/10