Title:
減圧式加熱装置とその加熱方法および電子製品の製造方法
Document Type and Number:
Japanese Patent JP4263761
Kind Code:
B1
Abstract:
An object is heated to a preheating temperature in an atmosphere of a reducing gas under the atmospheric pressure while adjusting the setting of the emissivity of a non-contact temperature measuring part and regulating the temperature of the object according to the measured value measured by a contact temperature measuring part. The pressure of the atmosphere is reduced. The object is further heated to a heating temperature under a lowered pressure while regulating the temperature of the object according to the measured value measured by the non-contact temperature measuring part whose setting of the emissivity is adjusted during the heating process to the preheating temperature. The pressure of the atmosphere is increased back to the atmospheric pressure while maintaining the heating temperature of the object. The temperature of the object is decreased under the atmospheric pressure. With this, in the process of heating an object under a lowered pressure, the actual temperature of the object is managed over the whole steps, and the object can be most suitably heated according to the actual temperature.
Inventors:
Sotaro Oi
Matsuura Masaya
Kubota Tomoyuki
Masaya Tsuruta
Matsuura Masaya
Kubota Tomoyuki
Masaya Tsuruta
Application Number:
JP2008007953A
Publication Date:
May 13, 2009
Filing Date:
January 17, 2008
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
Hirata Kiko Co., Ltd.
Hirata Kiko Co., Ltd.
International Classes:
H05K3/34; B23K1/00; G01J5/10; G01K13/00
Domestic Patent References:
| JP2005205418A | ||||
| JP2007246938A | ||||
| JP2000218151A |
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office