DEFECT CLASSIFICATION DEVICE - TORAY ENG CO LTD

Title:

DEFECT CLASSIFICATION DEVICE

Document Type and Number:

Japanese Patent JP2023133939

Kind Code:

A

Abstract:

To classify defect patterns occurring on an inspection target with high accuracy.SOLUTION: An automatic defect classification device 1 classifies a defect pattern P that occurs on an inspection target W. The automatic defect classification device 1 includes a plurality of defect classification units 10 that classify a defect pattern P and obtain a primary classification result R, a defect reclassification unit 20 that reclassifies the defect pattern P to obtain a reclassification result T on the basis of the plurality of primary classification results R obtained by the plurality of defect classification units 10, and a reclassification registration unit 30 for registering reclassification conditions V by the defect reclassification unit 20.SELECTED DRAWING: Figure 3

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Inventors:

OOMI HIDEKAZU

Application Number:

JP2022039210A

Publication Date:

September 27, 2023

Filing Date:

March 14, 2022

Export Citation:

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Assignee:

TORAY ENG CO LTD
TASMIT INC

International Classes:

H01L21/66; G06T7/00; G06V10/70

Attorney, Agent or Firm:

Patent Attorney Corporation Maeda Patent Office

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