To provide a defect inspecting device capable of detecting a defect of a phase shifter and a light transmissible foreign matter.
This device has two differential interference microscopic systems of transmission type and reflection type. A polarizing beam splitter 14, for example, is used as the analyzer of the transmission type differential interference microscope, and the transmitted light IT1 and reflected right IR1 of the beam splitter 14 are detected to provide the differential output S1 between them. In the reflecting type one, the differential output S2 is similarly provided. A defect is detected on the basis of the logical sum or logical product of the signals S1 and S2 or the difference between the signals S1 and S2. Further, the analyzer angle of the analyzer is made adjustable.
IWASAKI YUTAKA
OKI YASUSHI
