Title:
高圧処理によるタングステンの脱フッ素化
Document Type and Number:
Japanese Patent JP7234329
Kind Code:
B2
Abstract:
An annealing system is provided that includes a chamber body that defines a chamber, a support to hold a workpiece and a robot to insert the workpiece into the chamber. The annealing system also includes a first gas supply to provide a hydrogen gas, a pressure source coupled to the chamber to raise a pressure in the chamber to at least 5 atmospheres, and a controller configured to cause the robot to transport a workpiece having a metal film thereon into the chamber, where the metal film contains fluorine on a surface or embedded within the metal film, to cause the first gas supply to supply the hydrogen gas to the chamber and form atomic hydrogen therein, and to cause the pressure source to raise a pressure in the chamber to at least 5 atmospheres while the workpiece is held on the support in the chamber.
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Inventors:
Won, Keith Tatsun
Kwon, Thomas John Gwang
Kang, Sean
Yeah, Erie Wai.
Kwon, Thomas John Gwang
Kang, Sean
Yeah, Erie Wai.
Application Number:
JP2021165335A
Publication Date:
March 07, 2023
Filing Date:
October 07, 2021
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C16/08; C23C16/56; H01L21/28; H01L21/285; H01L21/3205; H01L21/768; H01L23/532
Domestic Patent References:
| JP10335657A | ||||
| JP2009539231A | ||||
| JP1218018A |
Foreign References:
| US20160118391 | ||||
| US20170011932 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation
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