Title:
DELAY CIRCUIT, TRAVELING-WAVE TUBE AND METHOD OF MANUFACTURING DELAY CIRCUIT
Document Type and Number:
Japanese Patent JP2020166935
Kind Code:
A
Abstract:
To provide a delay circuit which can be finely processed with high precision through simplified processes, a traveling-wave tube and a method of manufacturing the delay circuit.SOLUTION: A delay circuit 10 comprises a beam hole 16 which transmits an electron beam, a waveguide 15 which has a transmission line bypassing the beam hole 16 and transmits an electromagnetic wave, and first metal plating layers 112, 122 and second metal plating layers 113, 123 formed in order by plating on support substrates 111, 121. The waveguide 15 is formed in first metal plating layers 112, 122 and second metal plating layers 113, 123, and the beam hole 16 is formed in the second metal plating layers 113, 123. A laminate 11 having the support substrate 111, first metal plating layer 112 and second metal plating layer 113 laminated and a laminate 12 having the support substrate 121, first metal plating layer 122 and second metal plating layer 123 laminated join surfaces of the second metal plating layers 113, 123 to each other.SELECTED DRAWING: Figure 3
Inventors:
KANBARA RISUI
SHIRAYANAGI YUSUKE
HIRATA YOSHIAKI
MIZUTA TOMOYUKI
MUTO FUMIMASA
SHIRAYANAGI YUSUKE
HIRATA YOSHIAKI
MIZUTA TOMOYUKI
MUTO FUMIMASA
Application Number:
JP2019063377A
Publication Date:
October 08, 2020
Filing Date:
March 28, 2019
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01J23/28; H01J25/36
Attorney, Agent or Firm:
Kimura Mitsuru
Koji Yashima
Mie Hideki
Koji Yashima
Mie Hideki