Title:
DENCE FOR MEASURING TEMPERATURE OF SURFACE TO BE HEATED IN HEATING OVEN
Document Type and Number:
Japanese Patent JPH1174277
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To measure the temperature distribution of the surface to be heated in a highly precise manner, without being subjected to the effects of the irregularities of characteristics between the solid bodies of a thermoelectric couple and a temperature recorder by method, wherein the temperature of a plurality of positions on the surface in a heating oven are measured and recorded using a thermocouple. SOLUTION: A tip part 7 of a thermocouple 6 is brought into contact to an arbitrary radial position from the center of a wafer 4, and the temperature detected by the thermoelectric couple 6 is recorded by the recording paper of a temperature recorder which moves in synchronization with the rotation of the rotary shaft 10, while a wafer boat 5 is being slowly rotated with the circumferential speed of the wafer 4 reaching about 40 mm/minute. The position of the tip part 7 of the thermoelectric couple 6 with respect to the wafer 4 can be changed easily by oscillatingly moving the wafer 4 by a thermocouple protective thbe 12, or by having the thermocouple perform a horizontal movement on the wafer 4. Furthermore, it is undesirable to have too high a rotational speed of the tip part 7 of the thermocouple 6, because it is not adoptable for changes in temperature.
Inventors:
WATANABE TORU
Application Number:
JP24746497A
Publication Date:
March 16, 1999
Filing Date:
August 29, 1997
Export Citation:
Assignee:
SAKAGUCHI ELECTRIC HEATERS
International Classes:
F27B1/10; H01L21/22; H01L21/324; (IPC1-7): H01L21/324; F27B1/10; H01L21/22
Attorney, Agent or Firm:
Seiichi Sawaki (1 outside)