Title:
DEPOSITING METHOD AND DEVICE OF METAL FILM ON CERAMIC BASE BODY
Document Type and Number:
Japanese Patent JPH1192952
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To increase adhesion strength of a metal film to a ceramic base body by irradiating the surface of a ceramic body where a coating film is to be applied with excimer laser light before the metal film is deposited. SOLUTION: A metal film is deposited by plating on a ceramic base body 1 in the following processes. First, the ceramic base body 1 is fixed to a mount 12. The ceramic base body 1 consists of oxides, nitrides or silicates of metals, and when a nitride is used, one nitride of titanium, tantalum and tungsten is used. Then the ceramic base body 1 is irradiated with excimer laser light by using an excimer laser irradiating device 21. Then the laser irradiating device 21 is separated and the mount 12 is moved downward. A pump 15 is driven to supply a plating liquid in a plating liquid reservoir 14 to a plating tank 11, where a metal film is deposited on the ceramic base body 1 by plating. The material of the metal film is aluminum, copper, silver or alloys of these.
Inventors:
KOGURE NAOAKI
Application Number:
JP26931097A
Publication Date:
April 06, 1999
Filing Date:
September 16, 1997
Export Citation:
Assignee:
EBARA CORP
International Classes:
B23K26/34; C04B41/88; C23C18/16; C23C18/20; C25D5/54; H01L27/01; (IPC1-7): C23C18/20; B23K26/00; C04B41/88; C23C18/16; C25D5/54; H01L27/01
Attorney, Agent or Firm:
Isamu Watanabe (2 outside)
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