Title:
成膜装置
Document Type and Number:
Japanese Patent JP7291606
Kind Code:
B2
Abstract:
Provided is a film forming device which can form a functional film on a base material without decreasing the performance of the functional film. Specifically, the present invention comprises: a film forming chamber 7 for forming a thin film on a film forming surface side of a base material 2 which is conveyed roll-to-roll; guide members 8 which contact the film forming surface side of the base material 2 or the side opposite thereto to perform guidance in the conveyance direction of the base material 2, thereby forming a conveyance path for the base material 2; and a protective member bonding part 9a provided between the film forming chamber 7 and a guide member 8a that is positioned downstream of the film forming chamber 7 in the conveyance path of the base material 2 and that makes first contact with the film forming surface side of the base material 2, the protective member bonding part bonding a flexible protective member B to the film forming surface side of the base material 2.
Inventors:
Takuya Onchi
Tomonori Komori
Tomonori Komori
Application Number:
JP2019196642A
Publication Date:
June 15, 2023
Filing Date:
October 29, 2019
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
International Classes:
C23C16/54; B65H18/08; B65H20/02; B65H37/04; B65H41/00; C23C14/56; C23C14/58; C23C16/56
Domestic Patent References:
| JP2016010889A | ||||
| JP2006043965A | ||||
| JP5329981A | ||||
| JP2012057131A |