Title:
DEPOSITION FILM FORMATION DEVICE
Document Type and Number:
Japanese Patent JP2020050942
Kind Code:
A
Abstract:
To provide a deposition film formation device that can form a high-quality deposition film having excellent uniformity and reduced in image failures, and can form a deposition film at low cost.SOLUTION: A deposition film formation device satisfies relations of A
Inventors:
KOJIMA YASUO
TAZAWA DAISUKE
HOSOI KAZUTO
MIZUTANI MASAKI
OKAMURA TATSUJI
OYAMA KAZUNARI
TAZAWA DAISUKE
HOSOI KAZUTO
MIZUTANI MASAKI
OKAMURA TATSUJI
OYAMA KAZUNARI
Application Number:
JP2018184614A
Publication Date:
April 02, 2020
Filing Date:
September 28, 2018
Export Citation:
Assignee:
CANON KK
International Classes:
C23C16/458; G03G5/08; H01L21/205
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa