Title:
【発明の名称】圧力測定用ダイアフラムの重力誘発撓み
Document Type and Number:
Japanese Patent JP2894845
Kind Code:
B2
Abstract:
A pressure measurement and calibration apparatus for accurately detecting fluid pressures in the range of between approximately 0 and 1000 millitorr, and more particularly in the range of between 0 and 10 millitorr, and a method for calibrating an external pressure measuring device using the apparatus. The apparatus employs a pressure sensing assembly having a deflectable diaphragm and sensing electrodes. The assembly is rotated about an axis which is normal to the direction of local gravitational acceleration through preselected angles relative to the direction of local gravitational acceleration. The apparatus generates an output signal representative of the deflection of the diaphragm due to gravitational acceleration on the diaphragm at a given angular orientation. The apparatus then controllably conducts a fluid flow against the diaphragm at a sufficient pressure to substantially eliminate the deflection attributable to gravity on the diaphragm. The magnitude of the fluid pressure required to restore the diaphragm to its non-deflected state can then be computed with accuracy that is traceable to known primary standards.
Inventors:
HINKERU RYUUKU DEII
Application Number:
JP50450697A
Publication Date:
May 24, 1999
Filing Date:
June 24, 1996
Export Citation:
Assignee:
EMU KEI ESU INSUTORUMENTSU INC
International Classes:
G01L7/16; G01L27/00; (IPC1-7): G01L7/16; G01L27/00
Domestic Patent References:
| JP432734A |
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)