Title:
【発明の名称】振動制御のための方法およびデバイス
Document Type and Number:
Japanese Patent JP2002535582
Kind Code:
A
Abstract:
A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.
Inventors:
Spangler, Ronald
Biantoni, Emmanuel
Pretner, bharuch
Marsh, Bezi
Jacks, robert
Biantoni, Emmanuel
Pretner, bharuch
Marsh, Bezi
Jacks, robert
Application Number:
JP2000596286A
Publication Date:
October 22, 2002
Filing Date:
January 28, 2000
Export Citation:
Assignee:
Active Control Experts, Inc.
International Classes:
B06B1/02; B06B1/04; B06B1/06; B06B1/08; F16F15/00; F16F15/02; F16F15/027; G03F7/20; G05D19/02; H01L21/027; H01L21/68; H01L41/053; H01L41/09; H01L41/047; H04R17/08; (IPC1-7): F16F15/02; G03F7/20; G05D19/02; H01L21/027; H01L21/68
Domestic Patent References:
| JPH08326835A | 1996-12-10 | |||
| JPH0369839A | 1991-03-26 |
Attorney, Agent or Firm:
Shusaku Yamamoto