Title:
【発明の名称】熱処理チャンバのための基板支持部
Document Type and Number:
Japanese Patent JP2002510153
Kind Code:
A
Abstract:
A substrate support, such as an edge ring, includes an inner portion, and an outer portion contiguous with the inner portion and extending radially outward therefrom. The inner portion has a raised annular extension forming a ridge for supporting a substrate.
Inventors:
Mayur, Abhilash
Stern, Lewis, A.
Stern, Lewis, A.
Application Number:
JP2000541468A
Publication Date:
April 02, 2002
Filing Date:
February 23, 1999
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
F27D5/00; C23C16/458; C30B25/12; C30B31/14; H01L21/00; H01L21/26; H01L21/683; (IPC1-7): H01L21/26; F27D5/00; H01L21/68
Attorney, Agent or Firm:
Yoshiki Hasegawa (1 person outside)