Title:
【発明の名称】基板の画定されたエッチング方法
Document Type and Number:
Japanese Patent JP3038057
Kind Code:
B2
Abstract:
A process is described for defined etching of holes using a silver mask formed by silver diffusion transfer imaging.
Inventors:
Alan Cairncross
Chester Arthur Sayer The Second
Chester Arthur Sayer The Second
Application Number:
JP22795691A
Publication Date:
May 08, 2000
Filing Date:
September 09, 1991
Export Citation:
Assignee:
E.I.DU PONT DE NEMOURS AND COMPANY
International Classes:
G03C8/28; G03F7/07; H05K3/00; H05K3/06; H05K3/08; H05K3/10; G03F7/06; H05K3/46; (IPC1-7): G03F7/07; H05K3/00; H05K3/06; H05K3/08; H05K3/46
Domestic Patent References:
| JP63118747A | ||||
| JP54162546A | ||||
| JP5028254B2 | ||||
| JP492621B1 |
Attorney, Agent or Firm:
Chika Takagi (2 outside)