Title:
【発明の名称】電子線装置内の二次および/または後方散乱電子の検出装置
Document Type and Number:
Japanese Patent JP2559346
Kind Code:
B2
Abstract:
An electron beam apparatus has a primary beam directed onto a point of a specimen to generate emerging secondary electrons that proceed to a detector after traversing an electrical extraction field. The extraction field is provided between electrodes arranged in a plane perpendicular to the optical axis of the electron beam device and a magnetic field is provided perpendicular to the electrical extraction field to compensate for the forces of the extraction field exerted on the primary beam yet to promote extraction of the secondary electrons.
Inventors:
HARARUTO ROOZE
YOAHIMU TSUATSUHA
BURUKUHARUTO RISHUKE
YOAHIMU TSUATSUHA
BURUKUHARUTO RISHUKE
Application Number:
JP21251986A
Publication Date:
December 04, 1996
Filing Date:
September 09, 1986
Export Citation:
Assignee:
II TSUEE TEE INTEGUREITETSUDO SAAKITSUTO TESUCHINGU G FUYUA HARUPURAITAA PURYUUFUTEHINIKU MBH
International Classes:
G01N23/203; G01R31/28; G01T1/28; H01J37/153; H01J37/244; H01J37/252; H01J37/28; (IPC1-7): H01J37/244; G01N23/203; G01T1/28
Domestic Patent References:
| JP59134540A | ||||
| JP58179375A |
Attorney, Agent or Firm:
Tomimura Kiyoshi