Title:
【発明の名称】プロセス制御方法ならびにプロセスコントローラ、及びマスク領域の寸法の制御方法
Document Type and Number:
Japanese Patent JP2683469
Kind Code:
B2
Abstract:
A process controller (118) determines the quality of a measured process parameter value using a function of that parameter value which is positive over the range of values that the parameter may take on, monotonic, has a single peak at a preferred value for the parameter and is strictly decreasing with deviation from the preferred value. The quality function is used as an objective function to control the process to produce an optimal product.
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Inventors:
Jerome Marvin Cartsburg
Menachem Levanoni
Menachem Levanoni
Application Number:
JP32683991A
Publication Date:
November 26, 1997
Filing Date:
November 15, 1991
Export Citation:
Assignee:
International Business Machines Corporation
International Classes:
G05B13/02; B65G61/00; G05B15/02; G05B21/02; G06Q50/00; H01L21/027; H01L21/30; H01L21/66; (IPC1-7): G05B13/02; G05B15/02; G06F17/60; H01L21/30; H01L21/66
Domestic Patent References:
| JP1195503A | ||||
| JP310301A | ||||
| JP5720004U |
Attorney, Agent or Firm:
Koichi Tonmiya (1 person outside)