PURPOSE: To surely confirm an irradiation condition of a high energy beam by analyzing irradiation marks of a film to cover the surface to be machined.
CONSTITUTION: The film 2 having a lower melting point than the surface 1 to be machined is applied or stuck partially or all over the surface and scanned with an electron beam according to a specified condition. The electron beam is transimtted through the film 2 and the irradiation marks remain. The film which does not prevent incidence of the electron beam and causes thermal deformation in proportion to the incident energy is selected for this purpose. Consequently, an irradiation pattern, the energy quantity and density of the electron beam are detected from a state of the irradiation marks and quality control is facilitated.
HINA EIJI
NARUSE YUTAKA
OKAMOTO KAIZO
