Title:
検出素子、検出素子の製造方法、および検出装置
Document Type and Number:
Japanese Patent JP6645528
Kind Code:
B2
Abstract:
A detection element is described. The detection element comprises a substrate having a first surface and a second surface opposite to the first surface, the substrate arranged with a through hole; a through electrode arranged in the through hole, wherein the through electrode is filled in the through hole; a first electrode connected to the through electrode, the first electrode arranged on the first surface; a patterned electrode connected to the through electrode, the patterned electrode arranged on the second surface; and a second electrode arranged on the first surface, the second electrode separated from the first electrode. The substrate is a glass substrate, and the through hole has an inner diameter in the thickness direction of the substrate that is smaller than an inner diameter of the first penetrating end on the first surface and an inner diameter of the second penetrating end on the second surface.
Inventors:
Tomohisa Motomura
Osamu Shimada
Ryoichi Daito
Osamu Shimada
Ryoichi Daito
Application Number:
JP2018034548A
Publication Date:
February 14, 2020
Filing Date:
February 28, 2018
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G01T1/18; H01J47/04; H01J47/06
Domestic Patent References:
| JP2002090465A | ||||
| JP2007078653A | ||||
| JP2009224069A | ||||
| JP2009264997A | ||||
| JP2013011623A | ||||
| JP2013181800A | ||||
| JP2013254584A |
Foreign References:
| WO2016166970A1 | ||||
| WO2017061336A1 |
Attorney, Agent or Firm:
Takahashi Hayashi & Partners