Title:
検出素子、検出素子の製造方法、および検出装置
Document Type and Number:
Japanese Patent JP6645529
Kind Code:
B2
Abstract:
A detection element comprising: a substrate having a first surface and a second surface facing the first surface and having provided therein a through-hole having different inner diameters at two locations in the thickness direction of the substrate; a through-electrode arranged in the through-hole; a first insulating layer arranged on the first surface side and having provided therein a first opening that exposes part of the through-electrode; a first electrode connected to the through-electrode via the first opening and being arranged upon the first insulating layer; a pattern electrode connected to the through-electrode and arranged on the second surface side; and a second electrode arranged upon the first insulating layer and arranged spaced apart from the first electrode.
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Inventors:
Tomohisa Motomura
Osamu Shimada
Ryoichi Daito
Osamu Shimada
Ryoichi Daito
Application Number:
JP2018034549A
Publication Date:
February 14, 2020
Filing Date:
February 28, 2018
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G01T1/18; H01J47/04; H01J47/06
Domestic Patent References:
| JP2002090465A | ||||
| JP2007078653A | ||||
| JP2009224069A | ||||
| JP2009264997A | ||||
| JP2013011623A | ||||
| JP2013181800A | ||||
| JP2013254584A | ||||
| JP2015111057A |
Foreign References:
| WO2013157975A1 | ||||
| WO2016166970A1 | ||||
| WO2017061336A1 | ||||
| US5602397 |
Attorney, Agent or Firm:
Takahashi Hayashi & Partners