Title:
検出素子
Document Type and Number:
Japanese Patent JP6569763
Kind Code:
B2
Abstract:
A detection element can obtain a high-resolution radiation image having a high signal intensity and a high S/N ratio. A detection element including a substrate having a through hole, an insulating layer arranged inside of the through hole, a through electrode arranged further to the inner side of the through hole than the insulating layer, a resin layer having insulating properties and having an opening portion exposing the through electrode, a first electrode arranged above the through electrode and the resin layer, the first electrode being connected to the through electrode through the opening portion, and a second electrode arranged above the resin layer, the second electrode being separated from the first electrode.
Inventors:
Kohei Ota
Tomohisa Motomura
Takamasa Takano
Nakayama Koichi
Tomohisa Motomura
Takamasa Takano
Nakayama Koichi
Application Number:
JP2018072218A
Publication Date:
September 04, 2019
Filing Date:
April 04, 2018
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01J47/06; G01T1/18
Domestic Patent References:
| JP2015111057A | ||||
| JP2011017695A | ||||
| JP2010118645A | ||||
| JP55145397A | ||||
| JP2009264997A |
Other References:
Atsuhiko Ochi, et al.,Development of μ-PIC with resistive cathode,IEEE Nuclear Science Symposuim & Medical Imaging Conference,米国,IEEE,2010年11月 6日,12060660,958-961
Attorney, Agent or Firm:
Takahashi Hayashi & Partners