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Title:
DETECTOR AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2009301904
Kind Code:
A
Abstract:

To provide a detector having improved detecting sensitivity and accuracy when utilizing the electron multiplying operation by gas.

The radiation detector 1 utilizing the electron multiplying operation by gas comprises: an inorganic-material substrate 7 for forming an electric field in through-holes 9 passing through between both faces by giving a potential difference between both faces; and electron multiplying parts 3a, 3b having two metal thin films 8 formed on both faces of the substrate 7. The substrate 7 has the through-holes 9 formed passing through between the two metal thin films 8 after forming the two metal thin films 8. Thus, the concentration of gas in a casing 2 of the detector can be stabilized to improve the detecting accuracy of incident light and reduce the possibility that multiplied electrons E2, E3 are trapped by metal, thereby improving detecting sensitivity.


Inventors:
SAKURAI YOSHIHISA
SUMIYOSHI TAKAYUKI
TOKANO FUYUKI
SUGIYAMA HIROYUKI
OKADA AKIYUKI
Application Number:
JP2008155772A
Publication Date:
December 24, 2009
Filing Date:
June 13, 2008
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
H01J47/06; G01T1/185
Domestic Patent References:
JP2006302844A2006-11-02
JP2007059391A2007-03-08
JPH0794139A1995-04-07
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Yuji Suwa